Chemical mechanical polishing research of CdZnTe functional crystalline with soft brittle nature

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 44, Issue 12, 2008, Pages

  Zhang, Zhenyu ^a   Guo, Dongming ^a   Kang, Renke ^a   Gao, Hang ^a   Li, Yan ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

CdZnTe; Chemical mechanical polishing; Nanosphere polishing slurry; Soft brittle crystalline

Indexed keywords

ABRASIVES; CADMIUM ALLOYS; CADMIUM COMPOUNDS; CHEMICAL MECHANICAL POLISHING; CORROSION; CRYSTALLINE MATERIALS; MACHINING; NANOSPHERES; POLISHING; SURFACE DEFECTS; SURFACE ROUGHNESS; TELLURIUM COMPOUNDS; ZINC;

CDZNTE; CHEMICAL CORROSIONS; CORROSION PITS; EMBEDDED PARTICLES; HARD PARTICLES; MACHINING DEFECTS; MACHINING METHODS; MECHANICAL POLISHING; NOVEL METHODS; SOFT BRITTLE CRYSTALLINE;

CHEMICAL POLISHING;

EID: 58149292978     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2008.12.215     Document Type: Article

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