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Journal of Applied Physics

Volumn 104, Issue 11, 2008, Pages

Hydrodynamic loading of microcantilevers oscillating near rigid walls

(3) Tung, Ryan C a Jana, Anirban a Raman, Arvind a

a PURDUE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HYDRODYNAMICS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; THEOREM PROVING; THREE DIMENSIONAL;

AFM IN LIQUIDS; AMBIENT CONDITIONS; ATOMIC FORCE MICROSCOPES; CLOSED FORMS; DAMPING EFFECTS; DIVERSE APPLICATIONS; HYDRODYNAMIC FUNCTIONS; HYDRODYNAMIC LOADINGS; KNUDSEN; MICRO BEAMS; MICRO CANTILEVERS; MULTIPLE MODES; NONDIMENSIONAL NUMBERS; QUALITY FACTORS; RADIO FREQUENCIES; RIGID WALLS; SEMIANALYTICAL FORMULAS; SQUEEZE FILMS; STRUCTURE INTERACTIONS; TRANSIENT FLOWS;

FLUID DYNAMICS;

EID: 58149259967 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3033499 Document Type: Article

Times cited : (53)

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