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Volumn 8, Issue 10, 2008, Pages 5080-5084
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Controllable feature sizes of highly conductive poly(3,4- ethylenedioxythiophene) nanofilms patterned on SiO 2 surface
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Author keywords
Feature size; Patterning; Poly(3,4 ethylenedioxythiophene); Vapor phase polymerization
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Indexed keywords
ADHESION IMPROVEMENTS;
ATOMIC FORCE MICROSCOPES;
ELECTRICAL CONDUCTIVITIES;
ELECTRODE COMPONENTS;
ELECTRODE MATERIALS;
FEATURE SIZE;
NANO FILMS;
OPTICAL-;
OTFT DEVICES;
OTS MONOLAYERS;
PATTERNED FILMS;
PATTERNING;
PATTERNING METHODS;
PEDOT NANOFILMS;
PEEL TESTS;
POLY(3,4-ETHYLENEDIOXYTHIOPHENE);
REACTIVE ATOMIC OXYGENS;
SCRUTINIZATION;
SILICON WAFER SUBSTRATES;
V CURVES;
VAPOR PHASE POLYMERIZATION;
ADHESION;
ATOMIC PHYSICS;
BOND STRENGTH (CHEMICAL);
CHEMICAL BONDS;
CHEMICAL REACTIONS;
ELECTRIC CONDUCTIVITY;
ELECTRON ENERGY LEVELS;
MONOMERS;
OPTICAL CONDUCTIVITY;
OXYGEN;
POLYMERIZATION;
POLYMERS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON COMPOUNDS;
SILICON WAFERS;
THICK FILMS;
VAPOR PHASE EPITAXY;
VAPORS;
CONDUCTING POLYMERS;
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EID: 58149250573
PISSN: 15334880
EISSN: None
Source Type: Journal
DOI: 10.1166/jnn.2008.1297 Document Type: Conference Paper |
Times cited : (2)
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References (20)
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