A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation tests

Nanotechnology

Volumn 20, Issue 2, 2009, Pages

  Wei, Pal Jen ^a   Liang, Wen Long ^b   Ai, Chi Fong ^b   Lin, Jen Fin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; ENERGY RELEASE RATE; JOINTS (STRUCTURAL COMPONENTS); NANOINDENTATION; SILICON COMPOUNDS; STRAIN ENERGY;

CONSTANT RATES; DIAMOND-LIKE CARBONS; INDENTATION TESTS; LINEAR LOADS; MEMBRANE THEORIES; NANOINDENTATION TESTS; OSCILLATING MODES; PLANE STRESSES; STRAIN ENERGY RELEASE RATES; SUSPENDED FILMS;

STRAIN RATE;

CARBON; DIAMOND; SILICON;

ARTICLE; ENERGY; FILM; FORCE; MEMBRANE; METHODOLOGY; NANOTECHNOLOGY; PRIORITY JOURNAL; STRESS; THEORY;

EID: 58149242577     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/2/025701     Document Type: Article

References (25)

1. Volinsky A A, Moody N R and Gerberich W W 2002 Interfacial toughness measurements for thin films on substrates Acta Mater. 50 441-66
2. Oliver W C and Pharr G M 1992 An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments J. Mater. Res. 7 1564-83
3. Sakai M 1993 Energy principle of the indentation induced inelastic surface deformation and hardness of brittle materials Acta Metall. Mater. 41 1751-8
4. Suresh S and Giannakopoulos A E 1999 Determination of elastoplastic properties by sharp indentation Scr. Mater. 40 1191-8
5. Taljat B, Zacharia T and Kosel F 1998 New analytical procedure to determine stress-strain curve from spherical indentation data Int. J. Solids Struct. 35 4411-26
6. Field J S and Swain M V 1993 A simple predictive model for spherical indentation J. Mater. Res. 8 297-306
7. Fischer-Cripps A C 2004 Nanoindentation (New York: Springer)
8. 2-a new approach using the continuous stiffness technique MRS Symp. Proc. 522 53-64
9. Wei P J and Lin J F 2005 A new method developed to evaluate both the hardness and elastic modulus of a coating-substrate system Surf. Coat. Technol. 200 2489-96
10. Li X and Bhushan B 2003 Fatigue studies of nanoscale structures for MEMS/NEMS applications using nanoindentation technologies Surf. Coat. Technol. 163 521-6
11. Marshall D B and Evans A G 1984 Measurement of adherence residually stressed thin films by indentation: I. Mechanics of interface delamination J. Appl. Phys. 56 2632-8
12. Rosenfeld L G, Ritter J E, Lardner T J and Lin M R 1990 Use of the microindentation technology for determining the interfacial fracture energy J. Appl. Phys. 67 3291-6
13. Lucas B N, Oliver W C and Swindman J E 1998 The dynamics of frequency-specific, depth-sensing indentation testing MRS Symp. Proc. 522 3-14
14. Zhang Y W and Yang S 2004 Analysis of nanoindentation creep for polymeric materials J. Appl. Phys. 95 3655-66
15. Li J C M and Chu S N G 1979 Impression fatigue Scr. Mater. 13 1021-6
16. Li J C M 2002 Impression creep and other localized tests Mater. Sci. Eng. A 322 23-41
17. Kaszynski P, Ghorbel E and Marquis D 1998 An experimental study of ratcheting during indentation of 316L stainless steel ASME J. Eng. Mater. Technol. 120 218-23
18. Xu B X and Yue Z F 2006 Study of the ratcheting by the indentation fatigue method with a flat cylindrical indenter: part I. Experimental study J. Mater. Res. 21 1793-7
19. Xu B X and Yue Z F 2007 Study of the ratcheting by the indentation fatigue method with a flat cylindrical indenter: part II. Finite element simulation J. Mater. Res. 22 186-92
20. Rabe R, Breguet J M, Schwaller P, Stauss S, Haug F J, Patscheider J and Michler J 2004 Observation of fracture and plastic deformation during indentation and scratching inside the scanning electron microscope Thin Solid Films 469/470 206-13
21. Wei P J, Wang Y C and Lin J F 2008 Retardation of cyclic indentation creep exhibited in metal alloys J. Mater. Res. 23 2650-6
22. Schellin R, Hess G, Kühnel W, Thielemann C, Trost D, Wacker J and Steinmann R 1994 A new analytical solution for diaphragm deflection and its application to a surface-micromachined pressure sensor Sensors Actuators A 41/42 287-92
23. Swadener J G, Taljat B and Pharr G M 2001 Measurement of residual stress by load and depth sensing indentation with spherical indenters J. Mater. Res. 16 2091-102
24. Lee Y H and Kwon D 2002 Residual stress in DLC/Si and Cu/Si systems: application of a stress-relaxation model to the nanoindentation technique J. Mater. Res. 17 901-6
25. Kese K O, Li Z C and Bergman B 2004 Influence of residual stress on elastic modulus and hardness of soda-lime glass measured by nanoindentation J. Mater. Res. 19 3109-19