Dynamic and kinematic viscosity measurements with a resonating microtube

Sensors and Actuators, A: Physical

Volumn 149, Issue 1, 2009, Pages 38-41

  Sparks, D ^a   Smith, R ^a   Cruz, V ^a   Tran, N ^a   Chimbayo, A ^a   Riley, D ^a   Najafi, N ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

Density; MEMS; Microfluidics; Resonator; Viscosity

Indexed keywords

DAMPING; KINEMATICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SENSORS; TUBES (COMPONENTS); VISCOMETERS; VISCOSITY; VISCOSITY MEASUREMENT; VISCOSITY OF LIQUIDS;

CALIBRATION REFERENCES; DAMPING EFFECTS; DENSITY; DRIVE VOLTAGES; DYNAMIC VISCOSITIES; FLUID DAMPING; FLUID DENSITIES; KINEMATIC VISCOSITIES; MICRO TUBES; MICROMACHINED; RESONANT FREQUENCIES; VIBRATIONAL AMPLITUDES;

HYDRODYNAMICS;

EID: 58149191366     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.09.013     Document Type: Article

References (17)

1. Wells R., Denton R., and Merrill E. Measurement of viscosity of biologic fluids by cone plate viscometer. Jor. Lab Clin. Med. 57 (1961) 646-656
2. Rand P., Lacombe E., Hunt H., and Austin W. Viscosity of normal human blood under normothermic and hypothermic conditions. Jor. Appl. Physiol. 19 (1964) 117-122
3. Brand O., English J., Bidstrup S., and Allen M. Micromachined viscosity sensor for real-time polymerization monitoring. Technical Digest 1997 Intl. Conf. Solid-State and Actuators. Chicago, IL, June (1997) 121-124
4. Jakoby B., Scherer M., Buskies M., and Eisenschmid H. Microacoustic viscosity sensor for automotive applications. Tech. Digest 2002 IEEE Intl. Conf. On Sensors. Orlando, FL, June (2002) 1587-1590
5. Durdag K. Measuring viscosity with a surface acoustic wave sensor. Sensors 22 (2005) 34-36
6. Jain M., and Grimes C. Effect of surface roughness on liquid property measurements using a mechanically oscillating sensors. Sens. Actuators A 100 (2002) 63-69
7. Borwick R., Stupar P., and DeNatale J. Wide dynamic range microelectromechanical viscosity sensor. Solid-State Sensors and Actuator, and Microsystem Workshop. Hilton Head, SC, June (2006) 340-343
8. Enoksson P., Stemme G., and Stemme E. Fluid density sensor based on resonance vibration. Sens. Actuators A 46 (1995) 327-331
9. S. Tadigadapa, C. Tsai, Y. Zhang, N. Najafi, Micromachined fluidic apparatus, US Patent 6,477,901 (2002).
10. Sparks D., Smith R., Schneider R., Cripe J., Massoud-Ansari S., Chimbayo A., and Najafi N. A variable temperature, resonant density sensor made using an improved chip-level vacuum package. Sens. Actuators A 107 (2003) 119-124
11. Sparks D., Smith R., Massoud-Ansari S., and Najafi N. Coriolis mass flow, density and temperature sensing with a single vacuum sealed MEMS chip. Solid-State Sensors and Actuator, and Microsystem Workshop. Hilton Head, SC, June (2004) 75-78
12. D. Sparks, Resonant tube viscosity sensing device, US Patent 7,059,176 (2006).
13. Sparks D., Massoud-Ansari S., and Najafi N. Chip-level vacuum packaging of micromachines using nanogetters. IEEE Trans. Adv. Packaging 26 (2003) 277-282
14. Design Institute for Physical Properties, "DIPPR Project 801," Design institute for physical property data, AIChE (2005).
15. Mock G. Getting the most from specialty lubricants. Mach. Des. April (1986) 24-28
16. Sparks D., Bihary D., Goetzinger D., Najafi N., Kawaguchi K., and Yasuda M. Methanol concentration sensors for DMFCs. (Ch. 18). Small Fuel Cells 2006, The Knowledge Foundation. Washington, DC, March (2006) 606-630
17. Sparks D., Goetzinger D., Riley D., and Najafi N. A by-pass sensor package design enabling the use of microfluidics in high flow rate applications. Proceedings of the 2006 ASME MEMS/NEMS Packaging Symposium. Chicago, IL, November (2006)