Low propagation loss photonic wire and ring resonator devices in silicon-on insulator using hydrogen silsesquioxane electron-beam resist

ECIO'08 Eindhoven - Proceedings of the 14th European Conference on Integrated Optics and Technical Exhibition, Contributed and Invited Papers

Volumn , Issue , 2008, Pages 309-312

  Samarelli, A ^a   Gnan, M ^a,b   De La Rue, R M ^a   Sorel, M ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF FERRARA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; EXHIBITIONS; HYDROGEN; INTEGRATED CIRCUITS; INTEGRATED OPTICS; OPTICAL MATERIALS; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; RESONANCE; RESONATORS; WIRE;

LOW PROPAGATION LOSSES; OPTICAL DELAY LINES; PHOTONIC WIRE WAVEGUIDES; PHOTONIC WIRES; PROPAGATION LOSSES; RESONANCE FREQUENCIES; RING RESONATORS; SILICON ON INSULATORS; SILSESQUIOXANE; SMALL DISPERSIONS;

PHOTONICS;

EID: 58149131805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. K. K. Lee, D. R. Lim, H. C. Luan, A. Agrawal, J. Foresi and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model", App. Phys. Lett. 77, pp. 1617-1619, 2000.
2. M. Gnan, S. Thorns, D. S. Macintyre, R. M. De La Rue and M. Sorel, "Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist", Electronics Letters, vol. 44 n. 2, 2008.
3. A. Yariv, Y. Xu, R. K. Lee and A. Scherer, "Coupled-resonator optical waveguide: a proposal and analysis", Optics Letters, vol. 24 n. 11, pp. 711-713, 1999.
4. F. Xia, L. Sekaric and Y. Vlasov, "Ultracompact optical buffers on a silicon chip", Nature Photonics, vol. 1, pp. 65-71, 2007.