Mechanical characterisation of thin metal layers by modelling of the nanoindentation experiment

Proceedings - 2008 2nd Electronics Systemintegration Technology Conference, ESTC

Volumn , Issue , 2008, Pages 995-997

  Wittler, Olaf ^a   Mroßko, Raúl ^b   Kaulfersch, Eberhard ^a   Wunderle, Bernhard ^a   Michel, Bernd ^a  

^a FRAUNHOFER IZM   (Germany)

^b AMIC Angewandte Micro Messtechnik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERISATION; ELASTIC PLASTICS; MATERIAL DATUMS; MICROELECTRONIC PRODUCTS; NANOINDENTATION EXPERIMENTS; RELIABILITY ASSESSMENTS; SILICON SUBSTRATES; SPECIFIC MATERIALS; THIN METAL LAYERS;

FISCHER-TROPSCH SYNTHESIS;

NANOINDENTATION;

EID: 58149089890     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESTC.2008.4684488     Document Type: Conference Paper

References (8)

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8. Schatt, W., Worch, H., Werkstoffwissenschaft, Deutscher Verlag für Grundstoffindustrie, 8.Auflage (Stuttgart, 1996)