ZnO:Al based transparent thin film transistors

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 2008, Pages 65-66

  Lee, Ching Ting ^a   Shien, Wen Ming ^a   Lee, Hsin Ying ^a   Chou, Cheng Hsu ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b Chi Mei Optoelectronics Corporation   (Taiwan)

Author keywords

Magnetron radio frequency co sputtering system; Transparent thin film transistors; ZnO:Al

Indexed keywords

ALUMINUM; CARRIER MOBILITY; MAGNETRONS; RADIO; RADIO WAVES; SEMICONDUCTING ZINC COMPOUNDS; SOLIDS; THIN FILM DEVICES; THIN FILM TRANSISTORS; THIN FILMS; ZINC OXIDE;

CHANNEL LAYERS; DC CHARACTERISTICS; MAGNETRON RADIO FREQUENCY CO-SPUTTERING SYSTEM; ON/OFF CURRENT RATIOS; THERMAL STABILITIES; TRANSPARENT THIN FILM TRANSISTORS; ZNO FILMS; ZNO:AL;

TRANSISTORS;

EID: 58049152989     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/LEOS.2008.4688490     Document Type: Conference Paper

References (5)

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