A novel method of fabricating 3D spot-size converter on (111) SOI

Proceedings - IEEE International SOI Conference

Volumn , Issue , 2008, Pages 79-80

  Fang, Na ^a   Yang, Zhifeng ^a   Wu, Aimin ^a   Chen, Jing ^a   Zhang, Miao ^a   Zou, Shichang ^a   Wang, Xi ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS;

CRYSTAL PLANES; EFFICIENT COUPLINGS; HORIZONTAL DIRECTIONS; NOVEL METHODS; OPTICAL-; PROCESS TOLERANCES; SILICON MICROMACHINING; SILICON ON INSULATORS; SILICON PHOTONICS; SOI WAFERS; VERTICAL DIRECTIONS;

SILICON WAFERS;

EID: 57749201386     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2008.4656303     Document Type: Conference Paper

References (5)

1. R.A.Soref and J.P.Lorenzo, "All silicon active and passive guided-wave components for λ=1.3μm and 1.6 μm," IEEE J.Quantum Electron, vol. QE-22, pp. 873-879, June 1986.
2. 2 waveguide by roughness reduction," Opt. Lett, vol. 26, pp. 1888-1890, 2001.
3. www.confluentphotonics.com/technology/technical_papers. php#fabrication
4. J.J.Fijol, E.E.Fike, P.B.Keating, D.Gilbody, J.LeBlanc, S.A. Jacobson, W.J.Kessler, and M.B.Frish, "Fabrication of silicon-on-insulator adiabatic tapers for low loss optical interconnection of photonic devices," presented at the Photonics West,San Jose, California, USA, 25-31 Jan. 2003
5. T.Brenner, W.Hunziker, M.Smit, M.Bachmann, G.Guekos, and H.Melchior, "Vertical InP/InGaAsP tapers for low-loss optical fiber-waveguide coupling," Electron. Lett.