Adhesion promoter and anti-sticking layer effects on adhesion properties using symmetric AFM probe

Advanced Materials Research

Volumn 24-25, Issue , 2007, Pages 1113-1116

  Lee, Hee Jung ^a   Hyun, Seungmin ^a   Lee, Hak Joo ^a   Choi, Dae Geun ^a   Lee, Dong Il ^a   Lee, Eung Sug ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Adhesion promoter; AFM; Anti sticking layer; Nano imprint lithography; Symmetric AFM probe

Indexed keywords

CURING; LITHOGRAPHY; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES; PROBES;

ADHESION FORCES; ADHESION PROMOTER; ADHESION PROPERTIES; AFM PROBE; ANTISTICKING LAYERS; MEMS FABRICATION TECHNIQUES; REPRODUCIBILITIES; VAPOR DEPOSITION METHOD;

ADHESION;

EID: 57649105080     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/0-87849-463-4.1113     Document Type: Conference Paper

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