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Volumn 44, Issue 25, 2008, Pages 1460-1461

Micro-machined resistive micro-heaters for high temperature gas sensing applications

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRIC POWER UTILIZATION; FABRICATION; GAS DETECTORS; HEATING EQUIPMENT; PLATINUM; SILICON; SILICON COMPOUNDS;

EID: 57349131912     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20082563     Document Type: Article
Times cited : (6)

References (5)
  • 1
    • 3142715489 scopus 로고    scopus 로고
    • MEMS-based embedded sensor virtual components for system-on-a-chip (SoC)
    • 10.1016/j.sse.2004.05.012 0038-1101
    • Afridi, M., Hefner, A., Berning, D., Ellenwood, C., Varma, A., Jacob, B., and Semancik, S.: ' MEMS-based embedded sensor virtual components for system-on-a-chip (SoC) ', Solid-State Electron., 2004, 48, p. 1777-1781 10.1016/j.sse.2004.05.012 0038-1101
    • (2004) Solid-State Electron. , vol.48 , pp. 1777-1781
    • Afridi, M.1    Hefner, A.2    Berning, D.3    Ellenwood, C.4    Varma, A.5    Jacob, B.6    Semancik, S.7
  • 3
    • 0035876330 scopus 로고    scopus 로고
    • Results on the reliability of silicon micromachined structures for semiconductor gas sensors
    • 10.1016/S0925-4005(01)00706-7
    • Gracia, I., Santander, J., Cane, C., Horrillo, M.C., Sayago, I., and Gutirrez, J.: ' Results on the reliability of silicon micromachined structures for semiconductor gas sensors ', Sens. Actuators B, 2001, 77, p. 409-415 10.1016/S0925-4005(01)00706-7
    • (2001) Sens. Actuators B , vol.77 , pp. 409-415
    • Gracia, I.1    Santander, J.2    Cane, C.3    Horrillo, M.C.4    Sayago, I.5    Gutirrez, J.6
  • 5
    • 57349193078 scopus 로고    scopus 로고
    • ANSYS, Taesung S&E Inc., Korea, 2006
    • ANSYS, Taesung S&E Inc., Korea, 2006


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.