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Volumn 44, Issue 25, 2008, Pages 1460-1461
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Micro-machined resistive micro-heaters for high temperature gas sensing applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC POWER SUPPLIES TO APPARATUS;
ELECTRIC POWER UTILIZATION;
FABRICATION;
GAS DETECTORS;
HEATING EQUIPMENT;
PLATINUM;
SILICON;
SILICON COMPOUNDS;
BRIDGE TYPES;
GAS SENSORS;
HEAT SPREADING;
HIGH TEMPERATURE GASSES;
HIGH TEMPERATURES;
LOW POWERS;
SENSING APPLICATIONS;
STRESS COMPENSATIONS;
THERMAL EFFICIENCIES;
WHEATSTONE;
HIGH TEMPERATURE APPLICATIONS;
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EID: 57349131912
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:20082563 Document Type: Article |
Times cited : (6)
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References (5)
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