Wavelength modulation over 500 kHz of micromechanically tunable InP-based VCSELs with Si-MEMS technology

Conference Digest - IEEE International Semiconductor Laser Conference

Volumn , Issue , 2008, Pages 163-164

  Yano, T ^a   Saito, H ^a   Kanbara, N ^a   Noda, R ^a   Tezuka, S ^a   Fujimura, N ^a   Ooyama, M ^a   Watanabe, T ^a   Hirata, T ^a   Nishiyama, N ^b  

^a YOKOGAWA ELECTRIC CORPORATION   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS TECHNOLOGIES; MICROMACHINED; MOVABLE MIRRORS; VCSEL CHIPS; WAVELENGTH MODULATIONS;

ELECTRIC CONDUCTIVITY; HETEROJUNCTIONS; LASERS; MODULATION; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR MATERIALS; SILICON; SURFACE EMITTING LASERS;

SEMICONDUCTOR LASERS;

EID: 56749170929     PISSN: 08999406     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISLC.2008.4636060     Document Type: Conference Paper

References (3)

1. N. Kanbara et al., OMEMS2006, MA3, pp.9-10, 2006.
2. N. Nishiyama et al., IEEE J. Sel. Topics Quantum Electron., vol.11, no.5, pp.990-998, 2005.
3. T. Yano et al., SICE-ICASE International Joint Conference 2006 SP10-4, pp.5268-5272, 2006.