Improved picosecond laser radiation for micromachining

ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2006, Pages

  Herrmann, Thomas ^a   Haloui, Hatim ^a   Knappe, Ralf ^a   Henrich, Bernhard ^a   Nebel, Achim ^a  

^a Lumera Laser GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; PICOSECOND LASERS; PULSE REPETITION RATE;

ABLATION EFFICIENCY; ABLATION THRESHOLDS; HIGH PULSE REPETITION RATE; INDUSTRIAL MARKETS; LASER MICRO-MACHINING; MAXIMUM THROUGH-PUT; PRACTICAL EXPERIENCE; PROCESS PARAMETERS;

MICROMACHINING;

EID: 56749163237     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060859     Document Type: Conference Paper

References (6)

1. Breitling, D., Ruf, A., Dausinger, F. (2004) Fundamental aspects in machining of metals with short and ultra short laser pulses, Proc. of SPIE Vol. 5339, 49-63
2. Knappe, R., Herrmann, T., Henrich, B., Nebel, A. (2005) Novel picosecond lasers for fast micro-machining, Proc. of Third International WLT-Conference On Lasers in Manufacturing
3. Gu, B. (2005) Ultra fast laser processing for next generation memory repair and semiconductor manufacturing, Proc. of SPIE Vol. 5714-04
4. Nebel, A., Herrmann, T., Henrich, B., Knappe, R. (2006) Generation of tailored picosecond-pulse-trains for micro-machining, Proc. of SPIE Vol. 6108
5. Noh, J., Sohn, H., Suh, J., Lee,. J.-H. (2006) Application of picosecond laser micromachining for difraction gratings, The 4th International Congress on Laser Advanced Materials Processing, Kyoto, Japan, p. 262
6. Tönshoff, H. K., Ostendorf, A., Kulik, C., Siegel, F. (2003) Finishing of cutting tools using selective material ablation, Proc. of the 1. international CIRP seminar on micro and nano technologie, 77-80