Generation of tailored picosecond-pulse-trains for micro-machining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6108, Issue , 2006, Pages

  Nebel, Achim ^a   Herrmann, Thomas ^a   Henrich, Bernhard ^a   Knappe, Ralf ^a  

^a Lumera Laser GmbH   (Germany)

Author keywords

High precision; High speed; Micromachining; Picosecond lasers

Indexed keywords

DRILLING; LASER ABLATION; LASER BEAM CUTTING; MICROMACHINING;

HIGH PRECISION; HIGH SPEED; PICOSECOND LASERS;

LASER PULSES;

EID: 33645969271     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.645680     Document Type: Conference Paper

References (4)

1. Gu, B., (2005) "Ultra fast laser processing for next generation memory repair and semiconductor manufacturing", in Proc. of SPIE 5714-04
2. Liu, X. (2005) "Industrial applications of ultrahigh precision short pulse laser processing", in Proceedings of SPIE5713-56
3. M. Lapczyna, et al., (1999) "Ultra high repetition rate (133MHz) laser ablation of aluminum with 1.2-ps pulses", Appl. Phys. A 69, S883-S886
4. Knappe, R., Henrich, B., Herrmann, T., & Nebel, A. (2003), "High power Nd:YVO4-regenerative laser amplifier with 100 kHz repetition-rate", in Proceedings of CLEO / Europe, Munich, Germany, 22-27, June 2003, CA-11698, Europhys. Conf. Abstracts: Vol. 27E