Precision removal of ITO film by LD-pumped SHG YAG laser;Precision removal of ITO film by LD-pumped SHG YAG laser

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 68, Issue 12, 2002, Pages 1564-1569

  Okamoto, Yasuhiro ^a   Uno, Yoshiyuki ^a   Hirao, Yasuyuki ^a  

^a NONE

Author keywords

Backside irradiation; ITO film; LD pumped; SHG YAG laser; Transparent electrode

Indexed keywords

ELECTRIC INSULATION; GLASS; LASER BEAMS; LASERS; LIQUID CRYSTAL DISPLAYS;

BACKSIDE IRRADIATION; ITO FILM; LD-PUMPED; SHG YAG LASER; TRANSPARENT ELECTRODE;

THIN FILMS;

EID: 31344443453     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.68.1564     Document Type: Article

References (0)