Ellipsometer analysis in the n-k plane

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 119-127

  Barton, D ^a   Urban III, F K ^a  

^a FLORIDA INTERNATIONAL UNIVERSITY   (United States)

Author keywords

Ellipsometry; Optical measurement; Thin film

Indexed keywords

ALGORITHMS; COMPUTATIONAL METHODS; NUMERICAL METHODS; POLARIZATION; PROBLEM SOLVING; REFLECTION; THIN FILMS;

LEAST SQUARES METHODS; OPTICAL ANALYTICAL METHOD; OPTICAL MEASUREMENT; REFLECTING SURFACE PHYSICAL PARAMETERS;

ELLIPSOMETRY;

EID: 36049028650     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.080     Document Type: Article

References (6)

1. Azzam R.M.A., and Bashara N.M. Ellipsometry and Polarized Light (1977), North Holland, New York
2. McCrakin F.L., and Colson J.P. A Fortran Program for Analysis of Ellipsometer Measurements and Calculation of Reflection (1964), Dept. of Commerce, National Bureau of Standards: USGPO
3. Urban III F.K., and Comfort J.C. Thin Solid Films 253 (1994) 262
4. Barton D., Comfort J.C., and Urban III F.K. J. Vac. Sci. Technol., A, Vac. Surf. Films 14 3 (1996) 786
5. Conway J.B. Functions of One Complex Variable vol. II (1995), Springer-Verlag
6. Yamamoto M., and Namioka T. Appl. Opt. 31 (1992) 1612