A new subdivision method for grating-based displacement sensor using imaging array

Optics and Lasers in Engineering

Volumn 47, Issue 1, 2009, Pages 90-95

  Yuan, Bo ^a   Yan, Hui Ming ^a   Cao, Xiang Qun ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Displacement sensor; Grating; Imaging array; Subdivision

Indexed keywords

FADING (RADIO); IMAGE SENSORS; SEMICONDUCTOR MATERIALS; SENSORS; SIGNAL TO NOISE RATIO; UNCERTAINTY ANALYSIS;

CMOS IMAGE SENSORS; DISPLACEMENT SENSOR; DISPLACEMENT SENSORS; ELECTRICAL SIGNALS; EXTERNAL FACTORS; GRATING; GRATING IMAGES; GRATING PITCHES; HIGH RESOLUTIONS; IMAGING ARRAY; IMAGING ARRAYS; LOW COSTS; MAXIMUM DISPLACEMENTS; MEASUREMENT PRECISIONS; SIGNAL-TO-NOISE RATIOS; SUBDIVISION; SUBDIVISION METHODS; UNCERTAINTY OF MEASUREMENTS;

PIXELS;

EID: 56549103838     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.07.013     Document Type: Article

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