Predicting secondary ion formation in molecular dynamics simulations of sputtering

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 813-815

  Weidtmann, B ^a   Duvenbeck, A ^a   Wucher, A ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; IONIZATION; NONLINEAR EQUATIONS; SECONDARY EMISSION;

ELECTRON PROMOTION; ELECTRONIC FRICTION; IONIZATION PROBABILITIES; KINETIC EXCITATION; MOLECULAR DYNAMICS SIMULATIONS; NONLINEAR DIFFUSION EQUATIONS; RATE-EQUATION MODELS; SPUTTERED PARTICLES;

MOLECULAR DYNAMICS;

EID: 56449091019     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.062     Document Type: Article

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