Fabrication of LTCC micro-fluidic devices using sacrificial carbon layers

Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Volumn , Issue , 2005, Pages 59-66

  Birol, H ^a   Maeder, T ^a   Jacq, C ^a   Corradini, G ^a   Passerini, R ^a   Fournier, Y ^a   Straessler, S ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

3 D structuration; LTCC; Microfluidics; Sacrificial layer

Indexed keywords

DEVICE CHARACTERIZATION; ELECTRONIC INSTRUMENTS; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; MICRO-FLUIDIC DEVICES; SACRIFICIAL LAYER; SACRIFICIAL LAYER METHOD; STRUCTURATION;

CARBON BLACK; ELECTRONICS INDUSTRY; EXHIBITIONS; FABRICATION; FLUIDIC DEVICES; MICROFLUIDICS; MICROSYSTEMS; SCANNING ELECTRON MICROSCOPY; THERMOGRAVIMETRIC ANALYSIS;

CERAMIC MATERIALS;

EID: 56349117198     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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