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Volumn 93, Issue 19, 2008, Pages

GaN-nanowire/amorphous-Si core-shell heterojunction diodes

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CORUNDUM; DIODES; ELECTRIC WIRE; ELECTROPHORESIS; ETCHING; GALLIUM ALLOYS; GALLIUM NITRIDE; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; NITRIDES; PLASMA DEPOSITION; PLASMA DIODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; PLASMAS; SEMICONDUCTING GALLIUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DIODES; SHELLS (STRUCTURES); SILICON;

EID: 56249091390     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3021390     Document Type: Article
Times cited : (9)

References (14)
  • 1
    • 33751294582 scopus 로고    scopus 로고
    • 0022-3727 10.1088/0022-3727/39/21/R01.
    • W. Lu and C. M. Lieber, J. Phys. D 0022-3727 10.1088/0022-3727/39/21/R01 39, R387 (2006).
    • (2006) J. Phys. D , vol.39 , pp. 387
    • Lu, W.1    Lieber, C.M.2
  • 6
    • 12844269467 scopus 로고    scopus 로고
    • 1613-6810 10.1002/smll.200400030.
    • Y. Huang, X. Duan, and C. M. Leiber, Small 1613-6810 10.1002/smll. 200400030 1, 142 (2005).
    • (2005) Small , vol.1 , pp. 142
    • Huang, Y.1    Duan, X.2    Leiber, C.M.3
  • 8
    • 56249117403 scopus 로고    scopus 로고
    • RIE of SiO2 was performed with CHF3 / O2 / CF4 gas mixture (25/5/50 SCCM) and 50 W rf power.
    • RIE of SiO2 was performed with CHF3 / O2 / CF4 gas mixture (25/5/50 SCCM) and 50 W rf power.
  • 9
    • 56249132203 scopus 로고    scopus 로고
    • Certain commercial equipments or material suppliers are identified in this paper for describing experimental procedure adequately. This does not imply endorsement by NIST.
    • Certain commercial equipments or material suppliers are identified in this paper for describing experimental procedure adequately. This does not imply endorsement by NIST.
  • 10
    • 56249090798 scopus 로고    scopus 로고
    • Carrier concentration and resistivity data of a -Si as a function of diffusion temperature and time was generated by depositing a -Si on sapphire substrate and utilizing Hall effect and four-point resistivity measurements to characterize its electrical properties. The diffusion process with temperature ranging from 750 to 850 °C for 15 min resulted in -doping density in a -Si in the range of 5× 1019 -4× 1020 cm-3 and hole mobility in the range of 5-2 cm2 V-1 s-1. Diffusion time of 15 min resulted in a uniform dopant profile as confirmed by depth profiling, where resistivity was measured as the film was etched in regular steps. It is worth mentioning that after diffusion, XRD revealed the onset of crystallization in a -Si layer.
    • Carrier concentration and resistivity data of a -Si as a function of diffusion temperature and time was generated by depositing a -Si on sapphire substrate and utilizing Hall effect and four-point resistivity measurements to characterize its electrical properties. The diffusion process with temperature ranging from 750 to 850 °C for 15 min resulted in p -doping density in a -Si in the range of 5× 1019 -4× 1020 cm-3 and hole mobility in the range of 5-2 cm2 V-1 s-1. Diffusion time of 15 min resulted in a uniform dopant profile as confirmed by depth profiling, where resistivity was measured as the film was etched in regular steps. It is worth mentioning that after diffusion, XRD revealed the onset of crystallization in a -Si layer.
  • 11
    • 56249086922 scopus 로고    scopus 로고
    • RIE of Si was performed with CHF3 / CF4 /Ar gas mixture (25/50/10 SCCM) and 250 W rf power.
    • RIE of Si was performed with CHF3 / CF4 /Ar gas mixture (25/50/10 SCCM) and 250 W rf power.
  • 14
    • 0002930518 scopus 로고
    • 0021-8979 10.1063/1.1735965.
    • E. O. Kane, J. Appl. Phys. 0021-8979 10.1063/1.1735965 32, 83 (1961).
    • (1961) J. Appl. Phys. , vol.32 , pp. 83
    • Kane, E.O.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.