Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7101, Issue , 2008, Pages

  Albert, Stéphanie ^a   Barthelemy, Eleonore ^a   Vigreux, Caroline ^a   Pradel, Annie ^a   Barillot, Marc ^b  

^a UNIVERSITÉ DE MONTPELLIER   (France)

^b THALES ALENIA SPACE   (France)

Author keywords

Co thermal evaporation; Infrared applications; Reactive ion etching; Rib waveguides; Telluride glasses and films

Indexed keywords

COBALT; COBALT COMPOUNDS; ETCHING; EVAPORATION; FILMS; GERMANIUM; GLASS; MOISTURE; REACTIVE ION ETCHING; TELLURIUM COMPOUNDS; TERNARY SYSTEMS; THERMAL EVAPORATION; THICK FILMS; THIN FILMS; VAPORS; WAVEGUIDES;

BINARY FILMS; CO-THERMAL EVAPORATION; CORE LAYERS; DARWIN MISSIONS; FAR INFRARED; FILM DEPOSITIONS; GA FILMS; INFRARED APPLICATIONS; INFRARED REGIONS; INFRARED WINDOWS; PURE ELEMENTS; REACTIVE IONS; RIB WAVEGUIDES; SUPERSTRATE; TELLURIDE GLASSES; TELLURIDE GLASSES AND FILMS; THERMAL STABILITIES;

OPTICAL FILMS;

EID: 56249083192     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.797643     Document Type: Conference Paper

References (10)

1. M. Barillot, E. Barthélémy, J.-E. Broquin, J. Frayret, J. Grelin, G. Hawkins, V. Krischner, G. Parent, E. Rossi, C.Vigreux, S. Zhang et X. Zhang, Proceedings SPIE, Astronomical Instrumentation : Optical and Infrared Interferometry, 7013, 7013038 (2008).
2. L. Labadie, P. Kern, B. Arezki, C. Vigreux-Bercovici, A. Pradel and J.-E. Broquin, Optics Express, 14(18), 8459 (2006).
3. L. Labadie, J.-E. Broquin, P. Kern, P. Labeye, B. Arezki, I. Schanen-Duport, A. Pradel, C. Vigreux-Bercovici, B. André and P. Saguet, Proceedings SPIE, Techniques and Instrumentation for Detection of Exoplanets II, 5905, 590509 (2005).
4. C. Vigreux-Bercovici, L. Labadie, J.-E. Broquin, P. Kern and A. Pradel, Selenide and telluride thick films for mid and thermal infrared applications, Journal of Optoelectronics and Advanced Materials, 7(5), 2625 (2005).
5. L. Labadie, L. Abel-Tiberini, E. LeCoerer, C. Vigreux-Bercovici, B. Arezki, M. Barillot, J.-E. Broquin, A. Delboulbé, P. Kern, V. Krishner, P. Labeye, A. Pradel, C. Ruilier, P. Saguet, Proceedings SPIE, Advances in Stellar Interferometry, 6268, 62682E (2006).
6. X.H. Zhang, L. Calvez, V. Seznec, H.L. Ma, S. Danto, P. Houizot, C. Boussard-Plédel and J. Lucas, J. Non-Cryst Solids 352, 2411 (2006)
7. E. Barthelemy, C. Vigreux-Bercovici, P. Yot and A. Pradel, Optoelec. Adv. Mater. - Rapid Comm. 1(10), 487 (2007).
8. P. Petkov, M. Wuttig, P. Ilchev, T. Petkova, J. Optoelectron. Adv. Mater. 5(5), 1101 (2003).
9. Y. Sripathi, L. K. Malhotra, G. B. Reddy, Thin Solid Films 270, 60 (1995).
10. C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie and P. Kern, Applied Physics Letters, 90, 011110 (2007).