Nanocrystalline ZnO film layer on silicon and its application to surface acoustic wave-based streaming

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 9, 2008, Pages 4626-4629

  Lee, Dae Sik ^a   Luo, Jikui ^b,c   Fu, Yongqing ^b   Milne, William I ^b   Park, Nae Man ^a   Kim, Sang Hyeob ^a   Jung, Mun Yeon ^a   Maeng, Sunglyul ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF BOLTON   (United Kingdom)

Author keywords

Droplet; Microfluidic mixing; Nanocrystalline; Surface acoustic wave; ZnO film

Indexed keywords

DROPLET; MICROFLUIDIC MIXING; NANOCRYSTALLINE; SURFACE ACOUSTIC WAVE; ZNO FILM;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; CARBON DIOXIDE ARC WELDING; CONTACT ANGLE; DROP FORMATION; DROPS; ELASTIC WAVES; ELECTRIC CURRENTS; HYDROPHOBICITY; METALLIC FILMS; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; OPTICAL FILMS; SAWING; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SILANES; SILICON; SILICON COMPOUNDS; SILICON WAFERS; SURFACE CHEMISTRY; SURFACE TREATMENT; THICK FILMS; THIN FILMS; ZINC ALLOYS; ZINC OXIDE;

ACOUSTICS;

NANOPARTICLE; SILICON; ZINC OXIDE;

ACOUSTICS; ARTICLE; CHEMISTRY; CRYSTALLIZATION; EQUIPMENT DESIGN; HYDROPHOBICITY; METHODOLOGY; MICROFLUIDICS; NANOTECHNOLOGY; PHOTOCHEMISTRY; SURFACE PROPERTY; TRANSDUCER; X RAY DIFFRACTION;

ACOUSTICS; CRYSTALLIZATION; EQUIPMENT DESIGN; HYDROPHOBICITY; MICROFLUIDICS; NANOPARTICLES; NANOTECHNOLOGY; PHOTOCHEMISTRY; SILICON; SURFACE PROPERTIES; TRANSDUCERS; X-RAY DIFFRACTION; ZINC OXIDE;

EID: 55849117732     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2008.IC44     Document Type: Conference Paper

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