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Volumn 15, Issue 5, 2008, Pages 525-530

Formation mechanism and surface evolution of silver films sputtering deposited on silicone oil substrates

Author keywords

Internal stress; Liquid substrate; Surface evolution; Thin film

Indexed keywords

AGGLOMERATION; MAGNETRON SPUTTERING; METALLIC FILMS; SILICONES; SUBSTRATES; SURFACE MORPHOLOGY; THICK FILMS;

EID: 55849093938     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X0801172X     Document Type: Article
Times cited : (15)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.