Elastic-stress relaxation in heteroepitaxial structures investigated by computer simulation

Russian Microelectronics

Volumn 37, Issue 6, 2008, Pages 363-372

  Trushin, O S ^a  

^a Institute of Physics and Technology   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; EPITAXIAL GROWTH; STRESS RELAXATION;

2D MODELS; ATOMIC MECHANISMS; ENERGY CHARACTERISTICS; HETEROEPITAXIAL STRUCTURES; INTERATOMIC POTENTIALS; MULTIDIMENSIONAL SPACES; STRUCTURAL CHANGES; STRUCTURAL IMPERFECTIONS;

RESIDUAL STRESSES;

EID: 55849093634     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063739708060036     Document Type: Article

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