Energy loss mechanisms in SMR-type BAW devices

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 225-228

  Thalhammer, Robert ^a   Aigner, Robert ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Acoustic filters; Bulk acoustic wave devices; Duplexers

Indexed keywords

ACOUSTIC RESONATORS; ELECTRODES; ENERGY DISSIPATION; Q FACTOR MEASUREMENT; SILICA;

ACOUSTIC FILTERS; ACOUSTIC LEAKS; DUPLEXERS; OHMIC POWER;

ACOUSTIC BULK WAVE DEVICES;

EID: 33749255951     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516565     Document Type: Conference Paper

References (5)

1. R. Aigner, J. Ella, H.-J. Timme, L. Elbrecht, W. Nessler, S. Marksteiner, "Advancement of MEMS into RF-Filter Applications", Proc. of IEDM, pp. 897-900, 2002
2. J. Kaitila, M. Ylilammi, J. Ella, R. Aigner, "Spurious Resonance free Bulk Acoustic Wave Resonators", 2003 UFFC Digest, pp. 42-43, 2003
3. G. G. Fattinger, P. T. Tikka, "Modified Mach-Zehnder laser interferometer for probing Bulk Acoustic Devices", Appl. Phys. Lett., vol. 79 (3), pp. 290-292, Jul 2001
4. W. Mason, Physical Acoustics, Academic Press, 1964
5. R. Thalhammer, J. Kaitila, R. Aigner, S. Marksteiner, "Prediction of BAW resonator performance using experimental and numerical methods", 2004 UFFC Digest, Aug 2004