Organic Peracid Etches: A new class of chromium free etch solutions for the delineation of defects in different semiconducting materials

ECS Transactions

Volumn 10, Issue 1, 2007, Pages 21-31

  Possner, D ^a   Kolbesen, B O ^a   Cerva, H ^b   Kliuppel V ^b  

^a GOETHE UNIVERSITY   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; DEFECTS; ETCHING; HYDROFLUORIC ACID; PROPIONIC ACID; SEMICONDUCTOR MATERIALS;

CHROMIUM-FREE; CRYSTALLINE DEFECTS; DEFECT ETCHING; HEXAVALENT CHROMIUM; SEMICONDUCTING MATERIALS; SILICON SUBSTRATES;

NANOCRYSTALLINE MATERIALS;

EID: 55649090055     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2773973     Document Type: Conference Paper

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