Application of laser induced breakdown spectroscopy(LIBS) to microdetection of Au film machining

Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis

Volumn 28, Issue 10, 2008, Pages 2232-2236

  Yuan, Dong Qing ^a   Zhou, Ming ^a   Shen, Jian ^a   Ren, Nai Fei ^a   Cai, Lan ^a  

^a JIANGSU UNIVERSITY   (China)

Author keywords

Film; LIBS; Micro machining; Plasma; Real time control

Indexed keywords

GOLD; LASER DAMAGE; LASER EXCITATION; LASER PULSES; LASER SPECTROSCOPY; LASERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASMAS; PULSED LASER APPLICATIONS; QUALITY CONTROL; REAL TIME CONTROL; REAL TIME SYSTEMS; SPECTROSCOPIC ANALYSIS;

APPLICATION OF LASERS; AU FILMS; EXCITATION CONDITIONS; IN PROCESSING; LASER INDUCED BREAKDOWN SPECTROSCOPIES; LIBS; LOW FREQUENCIES; MICRO-ELECTRO-MECHANICAL SYSTEMS; PULSE LASERS; SINGLE PULSES; TIME CONTROLS;

MACHINING;

EID: 55649088026     PISSN: 10000593     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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