Thin-film optical sensors with silicon-compatible materials

Applied Optics

Volumn 36, Issue 21, 1997, Pages 5109-5121

  Poenar, Daniel P ^a,b   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Color sensor; Interference filter; Polysilicon photodiodes; Silicon compatible materials; Thin films

Indexed keywords

EID: 5544311998     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005109     Document Type: Article

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