Effect of water adsorption on microtribological properties of hydrogenated diamond-like carbon films

Tribology Letters

Volumn 17, Issue 3, 2004, Pages 575-580

  Tagawa, Masahito ^a   Ikemura, Masashi ^a   Nakayama, Yoshihito ^a   Ohmae, Nobuo ^a  

^a KOBE UNIVERSITY   (Japan)

Author keywords

Adhesion; Diamond like carbon; DLC; MEMS; Meniscus force; Micromachine; Microtribology; Water adsorption

Indexed keywords

DIAMOND-LIKE CARBON; FRICTION; MENISCUS; TRIBOLOGY;

EID: 5544267075     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:TRIL.0000044507.44022.13     Document Type: Article

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