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Volumn , Issue , 2008, Pages 59-65
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Self-restored barrier using Cu-Mn alloy
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Author keywords
[No Author keywords available]
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Indexed keywords
CERIUM ALLOYS;
COPPER;
MANGANESE;
MANGANESE ALLOYS;
MANGANESE COMPOUNDS;
METALLIZING;
SILICON CARBIDE;
TANTALUM;
45NM NODES;
BARRIER METALS;
BARRIER PROCESSES;
CAP LAYERS;
CU WIRINGS;
INTERCONNECT RESISTANCES;
COPPER ALLOYS;
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EID: 55349128189
PISSN: 15401766
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (7)
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