Design and experimental characterization of the chevron-type bi-stable actuator for optical switch applications

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 135-136

  Hwang, Il Han ^a   Shim, Yu Seok ^a   Kwon, Ho Nam ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Actuators; Fasteners; Forward contracts; Mechatronics; Microactuators; Micromechanical devices; Optical bistability; Optical design; Optical switches; Voltage

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; FASTENERS; MECHATRONICS; MICROACTUATORS; MOEMS; OPTICAL BISTABILITY; OPTICAL DESIGN; STIFFNESS;

EQUIVALENT STIFFNESS MODELS; EXPERIMENTAL CHARACTERIZATION; FORWARD CONTRACT; FORWARD-AND-BACKWARD; LOW VOLTAGE OPERATION; MICROMECHANICAL DEVICE; OPERATION PERFORMANCE; THICKNESS REDUCTION;

OPTICAL SWITCHES;

EID: 55349117867     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233503     Document Type: Conference Paper

References (4)

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2. B. D. Jensen, et al, Proc. ASME Int. Mech. Eng. Congress and Exposition, pp. 1-7, 2001.
3. W. Noell, et al, Optical MEMS 2001, pp. 13-14, 2001.
4. Q. Jin, et al, IEEE MEMS conference, pp. 64-67, 2001.