Photoplastic NEMS with an encapsulated polysilicon piezoresistor

2008 8th IEEE Conference on Nanotechnology, IEEE-NANO

Volumn , Issue , 2008, Pages 460-463

  Kale, Nitin S ^a   Nag, Sudip ^a   Pinto, R ^a   V Ramgopal Rao, ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; CHEMICAL VAPOR DEPOSITION; NANOTECHNOLOGY; POLYMERS;

BIO-CHEMICALS; GAUGE FACTORS; HOTWIRE CVD; NEMS DEVICES; PIEZORESISTOR; POLYSILICON FILMS; TEMPERATURE LIMITATIONS;

POLYSILICON;

EID: 55349098252     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2008.140     Document Type: Conference Paper

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