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Volumn 148, Issue 1, 2008, Pages 134-137

Fabrication and transverse piezoelectric characteristics of PZT thick-film actuators on alumina substrates

Author keywords

Microactuators; Piezoelectric films; Thick films

Indexed keywords

ACTUATORS; ALUMINA; FERROELECTRIC CERAMICS; MICROACTUATORS; PIEZOELECTRICITY; SCREEN PRINTING; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; THICK FILMS;

EID: 55349096091     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.06.031     Document Type: Article
Times cited : (38)

References (21)
  • 1
    • 0037186180 scopus 로고    scopus 로고
    • A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrates
    • V. Walter, P. Delobelle, P. Le Moal, E. Joseph, M. Collet, A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrates, Sens. Actuators A 96 (2002) 157-166.
    • (2002) Sens. Actuators A , vol.96 , pp. 157-166
    • Walter, V.1    Delobelle, P.2    Le Moal, P.3    Joseph, E.4    Collet, M.5
  • 2
    • 0034262574 scopus 로고    scopus 로고
    • Actuation properties of lead zirconate titanate thick films structured on si membrane by the aerosol deposition method
    • M. Lebedev, J. Akedo, Y. Akiyama, Actuation properties of lead zirconate titanate thick films structured on si membrane by the aerosol deposition method, Jpn. J. Appl. Phys. 39 (2000) 5600-5603.
    • (2000) Jpn. J. Appl. Phys , vol.39 , pp. 5600-5603
    • Lebedev, M.1    Akedo, J.2    Akiyama, Y.3
  • 5
    • 36449006373 scopus 로고
    • Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering
    • S. Watanabe, T. Fujiu, T. Fujii, Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering, Appl. Phys. Lett. 66 (1995) 1481-1483.
    • (1995) Appl. Phys. Lett , vol.66 , pp. 1481-1483
    • Watanabe, S.1    Fujiu, T.2    Fujii, T.3
  • 6
    • 33645044088 scopus 로고
    • Properties and applications of screen-printed piezoelectric films
    • S.L. Fu, K. Chung, S.Y. Cheng, Properties and applications of screen-printed piezoelectric films, Jpn. J. Appl. Phys. 24 ( 1985) 416-418.
    • (1985) Jpn. J. Appl. Phys , vol.24 , pp. 416-418
    • Fu, S.L.1    Chung, K.2    Cheng, S.Y.3
  • 7
    • 0028430891 scopus 로고
    • Development of piezoelectric micromovement actuator fabrication using a thick-film double paste printing method
    • H. Moilanen, J. Lappalainen, S. Leppavuori, Development of piezoelectric micromovement actuator fabrication using a thick-film double paste printing method, Sens. Actuators A 43 (1994) 357-365.
    • (1994) Sens. Actuators A , vol.43 , pp. 357-365
    • Moilanen, H.1    Lappalainen, J.2    Leppavuori, S.3
  • 8
    • 55349128615 scopus 로고    scopus 로고
    • Investigation of a commercial PZT thick-film composition on various substrates for high frequency ultrasonic applications
    • Vancouver, Canada
    • T. Rasmus Lou-Moller, E. Bove, A. Ringgaard, A.F. Pedersen, Investigation of a commercial PZT thick-film composition on various substrates for high frequency ultrasonic applications, in: Proceedings of the IEEE Ultrasonic Symposium, Vancouver, Canada, 2006, pp. 926-929.
    • (2006) Proceedings of the IEEE Ultrasonic Symposium , pp. 926-929
    • Rasmus Lou-Moller, T.1    Bove, E.2    Ringgaard, A.3    Pedersen, A.F.4
  • 11
    • 85030584330 scopus 로고    scopus 로고
    • F. Aldinger, in: G. Kostorz (Ed.), Ceramic Materials in Microelectronics-Possibilities and Limitations, High-Tech. Ceramics: View points and Perspectives, Academic Press, London, 1989 (Ch. 9).
    • F. Aldinger, in: G. Kostorz (Ed.), Ceramic Materials in Microelectronics-Possibilities and Limitations, High-Tech. Ceramics: View points and Perspectives, Academic Press, London, 1989 (Ch. 9).
  • 12
    • 0020734670 scopus 로고
    • Sintering of PZT ceramics. I. Atmosphere control
    • A.I. Kingon, J.B. Clark, Sintering of PZT ceramics. I. Atmosphere control, J. Am. Ceram. Soc. 66 (1983) 253-256.
    • (1983) J. Am. Ceram. Soc , vol.66 , pp. 253-256
    • Kingon, A.I.1    Clark, J.B.2
  • 13
    • 0015068107 scopus 로고
    • Point defects and sintering of lead zirconate-titanate
    • R.B. Atkin, R.M. Fulrath, Point defects and sintering of lead zirconate-titanate, J. Am. Ceram. Soc. 54 (1971) 265-270.
    • (1971) J. Am. Ceram. Soc , vol.54 , pp. 265-270
    • Atkin, R.B.1    Fulrath, R.M.2
  • 14
    • 0042783043 scopus 로고    scopus 로고
    • Measurement of transverse piezoelectric properties of PZT thin films
    • I. Kanno, H. Kotera, K. Wasa, Measurement of transverse piezoelectric properties of PZT thin films, Sens. Actuators A 107 (2003) 68-74.
    • (2003) Sens. Actuators A , vol.107 , pp. 68-74
    • Kanno, I.1    Kotera, H.2    Wasa, K.3
  • 15
    • 0034299268 scopus 로고    scopus 로고
    • Colloidal processing of ceramics
    • A. Jennifer, Lewis, Colloidal processing of ceramics, J Am. Ceram. Soc. 83 (2000) 2341-2359.
    • (2000) J Am. Ceram. Soc , vol.83 , pp. 2341-2359
    • Jennifer, A.1    Lewis2
  • 16
    • 0033715348 scopus 로고    scopus 로고
    • Lead zirconate titanate particle dispersion in thick fllm ink formulations
    • E.S. Thiele, N. Setter, Lead zirconate titanate particle dispersion in thick fllm ink formulations, J. Am. Ceram. Soc. 83(2000) 1407-1412.
    • (2000) J. Am. Ceram. Soc , vol.83 , pp. 1407-1412
    • Thiele, E.S.1    Setter, N.2
  • 17
    • 0036502886 scopus 로고    scopus 로고
    • Effect of type of solvent and disperant on nano PZT powder dispersion for tape casting slurry
    • S. Bhaskar Reddy, P. Paramanand Singh, N. Raghu, V. Kumar, Effect of type of solvent and disperant on nano PZT powder dispersion for tape casting slurry, J. Mater. Sci. 37 (2002) 929-934.
    • (2002) J. Mater. Sci , vol.37 , pp. 929-934
    • Bhaskar Reddy, S.1    Paramanand Singh, P.2    Raghu, N.3    Kumar, V.4
  • 19
    • 85030580642 scopus 로고    scopus 로고
    • Material characteristics of A-476 Tape Substrates for Thick Film, Kyocera, Japan.
    • Material characteristics of A-476 Tape Substrates for Thick Film, Kyocera, Japan.
  • 20
    • 0001298046 scopus 로고    scopus 로고
    • 31 piezoelectric constant measurement of lead zirconate titanate thin fllms
    • 31 piezoelectric constant measurement of lead zirconate titanate thin fllms, J. Appl. Phys. 86 (1999) 7017-7023.
    • (1999) J. Appl. Phys , vol.86 , pp. 7017-7023
    • Catten, E.1    Haccart, T.2    Remiens, D.3
  • 21
    • 20444493192 scopus 로고    scopus 로고
    • Characterization and modeling of 3D piezoelectric ceramic structure with ATILA software
    • E. Heinonen, J. Juuti, S. Leppavuori, Characterization and modeling of 3D piezoelectric ceramic structure with ATILA software, J. Eur. Ceram. Soc. 25 (2005) 2467-2470.
    • (2005) J. Eur. Ceram. Soc , vol.25 , pp. 2467-2470
    • Heinonen, E.1    Juuti, J.2    Leppavuori, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.