Fabrication of piezoelectric thick films for high frequency transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1999-2002

  Xu, Baomin ^a   Buhler, Steve ^a   White, David ^a   Zesch, James ^a   Wong, William ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY IMPEDANCES; IMAGING RESOLUTION; THICKNESS COUPLING MODES;

ACOUSTIC IMPEDANCE; BIOMEDICAL ENGINEERING; CERAMIC MATERIALS; COMPUTER SIMULATION; DENSIFICATION; DIELECTRIC PROPERTIES; OPTOELECTRONIC DEVICES; PIEZOELECTRIC MATERIALS; POLARIZATION; SPUTTERING; THICK FILMS; ULTRASONICS;

TRANSDUCERS;

EID: 4143051635     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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7. 3 thin films on stainless steel by excimer laser liftoff," Appl. Phys. Lett, vol. 76, 2000, pp. 227-229.
8. ANSI/IEEE Standard on Piezoelectricity, Std., IEEE, New York, 1987, p. 176.