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Volumn 47, Issue 8 PART 1, 2008, Pages 6459-6463

Characteristics of a DC-driven atmospheric pressure air microplasma jet

Author keywords

Atmospheric pressure; Microjet; Plasma torch; Surface treatment

Indexed keywords

AIR CLEANERS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; INDUSTRIAL APPLICATIONS; JETS; METEOROLOGY; MICROCIRCULATION; PLASMA DEVICES; PLASMA DIAGNOSTICS; PLASMA JETS; PLASMA TORCHES; PLASMAS; PRESSURE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES; SURFACE CLEANING;

EID: 55149118729     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.6459     Document Type: Article
Times cited : (16)

References (13)
  • 10
    • 55149113656 scopus 로고    scopus 로고
    • private communications
    • K. H. Schoenbach: private communications.
    • Schoenbach, K.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.