Influence of hydrogenation on the amorphous-to-crystalline phase transition characteristics of Ge2Sb2Te5 and Ge 8Sb2Te11 thin films

Japanese Journal of Applied Physics

Volumn 47, Issue 7 PART 1, 2008, Pages 5337-5341

  Kim, Sung Won ^a   Lim, Woo Sik ^a   Kim, Tae Wan ^b   Lee, Hyun Yong ^a  

^a Chonnam National University   (South Korea)

^b Sejong University   (South Korea)

Author keywords

Ge2Sb2Te5; Ge8Sb 2Te11; Hydrogenation; Nano pulse reflection; Phase transformation

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; ELECTROMAGNETIC WAVES; GERMANIUM; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; HYDROGEN; HYDROGENATION; HYDROGENOLYSIS; MASS SPECTROMETRY; PHASE TRANSITIONS; REFLECTION; SECONDARY ION MASS SPECTROMETRY; THICK FILMS; THIN FILMS; X RAY ANALYSIS;

ANNEALED FILMS; ANNEALING TEMPERATURES; CHALCOGENIDE FILMS; CRYSTALLINE PHASE TRANSFORMATIONS; CRYSTALLINE PHASE TRANSITIONS; CRYSTALLINE TRANSITIONS; DEPTH PROFILES; GE2SB2TE5; GE8SB 2TE11; HYDROGENATED FILMS; HYDROGENATION EFFECTS; NANO-PULSE REFLECTION; OPTICAL TRANSMITTANCES; PHASE TRANSFORMATION; PHASE-TRANSITION; PULSE REFLECTIONS; RESPONSE MEASUREMENTS; SECONDARY IONS; SIMS PROFILES; X-RAY DIFFRACTIONS;

TELLURIUM COMPOUNDS;

EID: 55149085953     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5337     Document Type: Article

References (19)

1. S. R. Ovshinsky: Phys. Rev. Lett. 21 (1968) 1450.
2. V. G. Zhdanov, B. T. Kolomiets, V. M. Lyubin, and V. K. Malinovsky: Phys. Status Solidi A 52 (1979) 621.
3. K. Tanaka: Curr. Opin. Solid State Mater. Sci. 1 (1996) 567.
4. S. R. Elliott: Physics of Amorphous Materials (Wiley, New York, 1990).
5. M. Kastner, D. Adler, and H. Fritzche: Phys. Rev. Lett. 37 (1976) 1504.
6. V. Lyubin and M. Klebanov: Phys. Rev. B 53 (1996) 11924.
7. H. Y. Lee, J. Y. Chun, C. H. Yeo, and H. B. Chung: J. Vac. Sci. Technol. A 18 (2000) 485.
8. H. Y. Lee, J. S. Song, and T. Yao: J. Appl. Phys. 91 (2002) 2870.
9. H. Y. Lee and T. Yao: J. Vac. Sci. Technol. B 20 (2002) 2017.
10. R. A. Street, C. C. Tsai, J. Kakalios, and W. B. Jackson: Philos. Mag. B 56 (1987) 305.
11. D. E. Carlson and C. W. Magee: Appl. Phys. Lett. 33 (1978) 81.
12. J. H. Coombs, A. P. J. M. Jongenelis, W. van Es-Spiekman, and B. A. J. Jacobs: J. Appl. Phys. 78 (1995) 4906.
13. N. Yamada, E. Ohno, K. Nishiuchi, N. Akahira, and M. Takao: J. Appl. Phys. 69 (1991) 2849.
14. H. Y. Lee, S. H. Park, J. Y. Chun, and H. B. Chung: J. Appl. Phys. 83 (1998) 5381.
15. K. Tanaka: J. Non-Cryst. Solids 35-36 (1980) 1023.
16. N. F. Mott and E. A. Davis: Electronic Processes in Non-Crystalline Materials (Clarendon, Oxford, U.K., 1979) 2nd ed., p. 442.
17. H. Y. Lee and H. B. Chung: J. Vac. Sci. Technol. B 15 (1997) 818.
18. Y. Utsugi and Y. Mizushima: J. Appl. Phys. 51 (1980) 1773.
19. J. P. deNeufville: in Optical Properties of Solids-New Development, ed. B. O. Scraphin (North-Holland, Amsterdam, 1976) Chap. 15.