Selective barrier perforation in porous alumina anodized on substrates

Advanced Materials

Volumn 20, Issue 7, 2008, Pages 1368-1372

  Oh, Jihun ^a   Thompson, Carl V ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDS; ALUMINA; ANTIREFLECTION COATINGS; LITHOGRAPHY; MAGNETIC FILMS; OXIDE MINERALS; QUARTZ; SILICON;

ANODIZATION; BASE PRESSURES; BEAM EVAPORATIONS; BI-LAYERS; BILAYER FILMS; CHROMIC ACIDS; DOUBLE EXPOSURES; INTERFERENCE LITHOGRAPHIES; LLOYD'S MIRRORS; NEGATIVE PHOTORESISTS; POROUS ALUMINAS; QUARTZ CRYSTAL MONITORS; SELECTIVE BARRIERS; SELECTIVE REMOVALS; SI SUBSTRATES; SQUARE ARRAYS; THICKNESS OF THE FILMS;

SUBSTRATES;

EID: 54949146081     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200701719     Document Type: Article

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