Double-mode miniature cantilever-type ultrasonic motor using lead-free array-type multilayer piezoelectric ceramics

Japanese Journal of Applied Physics

Volumn 47, Issue 5 PART 2, 2008, Pages 4242-4247

  Doshida, Yutaka ^a,b   Kishimoto, Sumiaki ^a   Iriedav, Taisei ^a   Tamura, Hideki ^b   Tomikawa, Yoshiro ^b   Hirose, Seiji ^b  

^a TAIYO YUDEN CO LTD   (Japan)

^b YAMAGATA UNIVERSITY   (Japan)

Author keywords

(Sr,Ca)2NaNb5O15; Array type; Bending vibration; Cantilever; Lead free piezoelectric ceramics; Mode rotation; Multilayer piezoelectric ceramics; PZT; Ultrasonic motor

Indexed keywords

BENDING (DEFORMATION); BUILDING MATERIALS; CALCIUM; CERAMIC MATERIALS; ELECTRIC MOTORS; ELECTROMECHANICAL DEVICES; LATTICE VIBRATIONS; LEAD; LEAD ALLOYS; LITHIUM; MATERIALS PROPERTIES; MOTORS; MULTILAYERS; NIOBIUM; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC CERAMICS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; ULTRASONIC EQUIPMENT; ULTRASONIC MACHINE TOOLS; ULTRASONICS; VIBRATORS; ZINC; ZIRCONIUM;

(SR,CA)2NANB5O15; ARRAY-TYPE; BENDING VIBRATION; CANTILEVER; LEAD-FREE PIEZOELECTRIC CERAMICS; MODE ROTATION; MULTILAYER PIEZOELECTRIC CERAMICS; PZT; ULTRASONIC MOTOR;

PIEZOELECTRICITY;

EID: 54949127176     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.4242     Document Type: Article

References (25)

1. T. Morita: Sens. Actuators A 103 (2003) 291.
2. R. Yoshida and Y. Okamoto: Seimitsu Kogakukaishi 68 (2002) 645 [in Japanese].
3. C. W. Ha, B. W. Min, and Y. J. Jang: Proc. 10th Int. Conf. New Actuators, 2006, p. 572.
4. Y. Yamayoshi, S. Hirose, S. Sone, and H. Nakamura: Jpn. J. Appl. Phys. 33(1994) 3081.
5. T. Morita, M. K. Kurosawa, and T. Higuchi: Sens. Actuators A 83 (2000) 225.
6. O. Miyazawa, Y. Hashimoto, T. Funasaka, and M. Huruhata: Jpn. J. Appl. Phys. 38 (1999) 5608.
7. A. lino, K. Suzuki, M. Kasuga, M. Suzuki, and T. Yamanaka: Ultrasonics 38 (2000) 54.
8. Y. Tomikawa, T. Funakubo, O. Miyazawa, M. Aoyagi, and T. Takano: Proc. 5th World Congr. Ultrasonics, 2003, p. 1569.
9. S. Cagaty, B. Koc, P. Moses, and K. Uchino: Jpn. J. Appl. Phys. 43 (2004) 1429.
10. T. Kanda, A. Makino, Y. Oomori, and K. Suzumori: Jpn. J. Appl. Phys. 45 (2006) 4764.
11. J. Saito, J. R. Friend, K. Nakamura, and S. Ueha: Jpn. J. Appl. Phys. 44 (2005) 4666.
12. C. Lu, T. Zhou, Y. Chen, and K. Lu: Jpn. J. Appl. Phys. 45 (2006) 4770.
13. Y. Chen, K. Lu, T. Zhou, T. Liu, and C. Lu: Jpn. J. Appl. Phys. 45 (2006) 4780.
14. H. P. Ko, K. J. Lee, K. H. Yoo, C. Y. Rang, S. Kim, and S. J. Yoon: Jpn. J. Appl. Phys. 45 (2006) 4782.
15. H. Tamura, K. Kawai, T. Takano, Y. Tomikawa, S. Hirose, and M. Aoyagi: Jpn. J. Appl. Phys. 46 (2007) 4698.
16. Y. Doshida, S. Kishimoto, K. Ishii, H. Kishi, H. Tamura, Y. Tomikawa, and S. Hirose: Jpn. J. Appl. Phys. 46 (2007) 4921.
17. Y. Doshida, S. Kishimoto, K. Ishii, H. Kishi, H. Tamura, Y. Tomikawa, and S. Hirose: Proc. 13th US-Japan Semin. Dielectric and Piezoelectric Ceramics, 2007, p. 85.
18. R. R. Neurgaonkar, W. F. Hall, J. R. Oliver, W. W. Ho, and W. K. Cory: Ferroelectrics 87 (1988) 167.
19. R. R. Neurgaonkar, J. R. Oliver, W. K. Cory, L. E. Cross, and D. Viehland: Ferroelectrics 160 (1994) 265.
20. R. J. Xie and Y. Akimune: J. Mater. Chem. 12 (2002) 3156.
21. Y. Doshida, K. Tsuzuku, H. Kishi, A. Makiya, S. Tanaka, and K. Uematsu: Ext. Abstr. (64th Autum Meet. 2003); Japan Society of Applied Physics and Related Societies, 30a-YC-5 [in Japanese].
22. Y. Doshida, H. Kishi, Y. Hattori, A. Makiya, S. Tanaka, K. Uematsu, and T. Kimura: Proc. 12th US-Japan Semin. Dielectric and Piezoelectric Ceramics, 2005, p. 123.
23. Y. Doshida, H. Kishi, A. Makiya, S. Tanaka, K. Uematsu, and T. Kimura: Jpn. J. Appl. Phys. 45 (2006) 7460.
24. S. Kawada, H. Ogawa, M. Kimura, K. Shiratsuyu, and H. Niimi: Jpn. J. Appl. Phys. 45 (2006) 7455.
25. K. Nakamura, M. Kurosawa, H. Kurebayashi, and S. Ueha: IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38 (1991)481.