Microstructures and properties of diamond-like carbon/TiAlN composite films by MF magnetron sputtering

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 28, Issue 5, 2008, Pages 424-428

  Zhang, Yichen ^a   Ba, Dechun ^a   Yu, Dayang ^a   Ma, Shengge ^b  

^a NORTHEASTERN UNIVERSITY   (China)

^b National R and D Center for Surface Engineering of China   (China)

Author keywords

DLC films; Medium frequency sputtering; Plasma ion assisted deposition; TiAlN films; Unbalanced magnetron sputtering

Indexed keywords

CARBON FILMS; COMPOSITE MATERIALS; CORROSION RESISTANCE; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; ION BEAM ASSISTED DEPOSITION; ION SOURCES; IONS; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; SILICON; SPEED; STEEL; SUBSTRATES; SURFACE STRUCTURE; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

DLC FILMS; MEDIUM FREQUENCY SPUTTERING; PLASMA ION ASSISTED DEPOSITION; TIALN FILMS; UNBALANCED MAGNETRON SPUTTERING;

COMPOSITE FILMS;

EID: 54949083913     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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