Non-ohmic contact resistance and field-effect mobility in nanocrystalline silicon thin film transistors

Applied Physics Letters

Volumn 93, Issue 16, 2008, Pages

  Ahnood, Arman ^a   Ghaffarzadeh, Khashayar ^a   Nathan, Arokia ^a   Servati, Peyman ^b   Li, Flora ^c   Esmaeili Rad, Mohammad R ^c   Sazonov, Andrei ^c  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^c UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; IMPACT RESISTANCE; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; OHMIC CONTACTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILM DEVICES; THIN FILM TRANSISTORS; THIN FILMS; TRANSISTORS;

CONTACT RESISTANCE EFFECTS; DEVICE PARAMETERS; ELECTRICAL CHARACTERISTICS; NANOCRYSTALLINE; NONLINEAR; OHMIC CONTACT RESISTANCES; SIGNIFICANT IMPACTS;

FIELD EFFECT TRANSISTORS;

EID: 54949083004     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2999590     Document Type: Article

References (8)

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