Optical properties of Zr and ZrO2 films deposited by laser ablation

Microelectronics Journal

Volumn 39, Issue 11, 2008, Pages 1371-1373

  Prieto Lopez L O ^a   Yubero, F ^b   Machorro, R ^a   De La Cruz, W ^a  

^a CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA   (Mexico)

^b INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

Author keywords

PLD; REELS; ZrO2

Indexed keywords

ABLATION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ENERGY DISSIPATION; LASER ABLATION; OPTICAL PROPERTIES; OXYGEN; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; REELS; SUBSTRATES; X RAY DIFFRACTION; ZIRCONIA; ZIRCONIUM;

MONOCLINIC STRUCTURES; OPTIMAL CONTROLS; POLYCRYSTALLINE; REACTIVE LASER ABLATION; REFLECTION ELECTRON ENERGY LOSS SPECTROSCOPIES; SILICON SUBSTRATES; SUBSTRATE TEMPERATURE; ZRO2;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 54849434865     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2008.01.048     Document Type: Article

References (2)

1. Ferrari S., Dekadjevi D.T., Spiga S., Tallarida G., Wiemer C., and Fanciulli M. J. Non-Crystalline Solids 303 1 (2002) 29-34
2. Yubero F., and Tougaard S. Phys. Rev. B 46 4 (1992) 2486-2497