Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering

Zeitschrift fur Kristallographie, Supplement

Volumn 2, Issue 26, 2007, Pages 247-252

  Kuzel R ^a   Nichtova L ^a   Matej Z ^b   Herman D ^b   Sicha J ^b   Musil, J ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Crystallization; Thin films; Titanium oxide; X ray diffraction

Indexed keywords

EID: 54849424001     PISSN: 0930486X     EISSN: None     Source Type: Journal    
DOI: 10.1524/zksu.2007.2007.suppl_26.247     Document Type: Conference Paper

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