Implementation of maskless laser lithography using a Raman spectroscopy microprobe

Review of Scientific Instruments

Volumn 79, Issue 9, 2008, Pages

  Codan, Barbara ^a   Sergo, Valter ^a  

^a UNIVERSITY OF TRIESTE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749114849     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2981701     Document Type: Article

References (6)

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3. K. A. Valiev, The Physics of Submicron Lithography (Plenum, New York, 1992).
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5. F. Antoniolli, S. Maggiolino, P. Gallina, N. Scuor, R. Mahajan, and O. Sbaizero, Proceedings of the International Conference on MEMS and Nanotechnology (Kuala Lumpur, Malaysia, 2008), pp. 190-193.
6. R. Kostecki, X. Song, and K. Kinoshita, Electrochem. Solid-State Lett. 1099-0062 10.1149/1.1473256 5, E29 (2002).