Late-news poster: A 14inch uniform AMOLED display with low cost PECVD based microcrystalline silicon TFT backplanes

Digest of Technical Papers - SID International Symposium

Volumn 39, Issue 3, 2008, Pages 1289-1292

  Girotra, Kunal ^a   Park, Seungyu ^a   Huh, Jung Moo ^a   Hong, Chen ^a   Park, Kyoungtae ^a   Lee, Sangpil ^a   Lee, J H ^a   Chu, Changwoong ^a   Goh, Joonchul ^a   Choi, Joonhoo ^a   Kim, Chiwoo ^a   Souk, J H ^a  

^a Samsung LCD R and D Center   (South Korea)

Author keywords

AMOLED; Display; Microcrystalline silicon; PECVD; Stability; TFT

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; COSTS; DISPLAY DEVICES; FIELD EFFECT TRANSISTORS; ORGANIC LIGHT EMITTING DIODES (OLED); PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

AM-OLED; COST ADVANTAGES; DEPOSITION TIME; ELECTRICAL STRESS; FIELD-EFFECT MOBILITIES; GAS PRECURSORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); THRESHOLD VOLTAGE SHIFTS;

MICROCRYSTALLINE SILICON;

EID: 54549093638     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.3069375     Document Type: Conference Paper

References (3)

1. R.B. Wehrspoon, S.C. Deane, I.D. French, M.J.Powell, Thin Solid films 383, 117-121, 2001
2. G. Cicala, P. Capezzuto, and G.Bruno, Journal of Vacuum Science & Technology. A 19(2), Mar/April 2001.
3. P. Roca i Cabarrocas, S. Kasouit, B. Kalache, R. Vanderhaghen, and Y. Bonnassieux, M.Elyaakoubi, I.French, Journal of SID, SID Symposium Digest of Technical Papers, 34, 1, 1096-1099 May 2004.