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Volumn 93, Issue 3, 2008, Pages 745-749
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Synthesis of DLC films by PLD from liquid target and dependence of film properties on the synthesis conditions
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Author keywords
[No Author keywords available]
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Indexed keywords
ABLATION;
ATOMIC FORCE MICROSCOPY;
ATOMIC SPECTROSCOPY;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
ELECTRIC LOAD MANAGEMENT;
EXCIMER LASERS;
FILM PREPARATION;
GAS LASERS;
KRYPTON;
LASER ABLATION;
LASER EXCITATION;
LASERS;
MICROSCOPIC EXAMINATION;
PULSED LASER APPLICATIONS;
PULSED LASER DEPOSITION;
SURFACE ROUGHNESS;
ATOMIC FORCES;
CARBON FORMATIONS;
DLC FILMS;
FILM PROPERTIES;
KRF EXCIMER LASERS;
LIQUID TARGETS;
RAMAN SCATTERING SPECTROSCOPIES;
RAMAN STUDIES;
REACTION CHAMBERS;
SUBSTRATE TEMPERATURES;
SYNTHESIS CONDITIONS;
SYNTHESIS OF;
CARBON FILMS;
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EID: 54549085645
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-008-4706-9 Document Type: Article |
Times cited : (13)
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References (33)
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