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Volumn 23, Issue 10, 2008, Pages 2749-2756

Interfacial adhesion and friction of pyrolytic carbon thin films on silicon substrates

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; ADHESION; CARBON; FRICTION; OXYGEN; PHASE INTERFACES; SEMICONDUCTING SILICON COMPOUNDS; SILICON; STEEL STRUCTURES; SUBSTRATES; THICK FILMS;

EID: 54449084665     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0339     Document Type: Article
Times cited : (9)

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