Low-loss optical waveguides written by femtosecond laser pulses for three-dimensional photonic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 524-538

  Fukuda, Takeshi ^a   Ishikawa, Shimon ^a   Fujii, Tomoko ^a   Sakuma, Ken ^a   Hosoya, Hideyuki ^a  

^a FUJIKURA LTD   (Japan)

Author keywords

Glass and other amorphous materials; Integrated optical devices; Laser microfabrication; Multiphoton process; Ultrafast lasers

Indexed keywords

GLASS; LASER BEAM EFFECTS; LASER PULSES; LIGHT AMPLIFIERS; LIGHT SCATTERING; OPTICAL BEAM SPLITTERS; OPTICAL FIBERS; OPTICAL WAVEGUIDES; OPTIMIZATION; PHOTONS; REFRACTIVE INDEX; THREE DIMENSIONAL;

GLASS AND OTHER AMORPHOUS MATERIALS; INTEGRATED OPTICAL DEVICES; LASER MICROFABRICATION; MULTIPHOTON PROCESS; ULTRAFAST LASERS;

INTEGRATED OPTICS;

EID: 5444256213     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.528689     Document Type: Conference Paper

References (32)

1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, pp.1729-1731, 1996.
2. K. Miura, H. Inoue, J. Qiu, T. Mitsuyu, and K. Hirao, "Optical waveguides induced in inorganic glasses by a femtosecond laser," Nucl. Instr. and Meth. B 141, pp.726-732, 1998.
3. C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojule energy," Opt. Lett. 26, pp.93-95, 2001
4. D. Cork, P. Herman, R. Bhardwaj, P. B. Corkumn, and D. M. Rayner, "Prospects for ultrafast-laser writing of three-dimensional photonic devices for Telecom applications," in Optical Fiber Communication Cofenrence, 2002 OSA Technical Digest Series (Optical Society of America, Anaheim, 2002), paper ThGG52
5. A. M. Streltsov, and N. F. Borrelli, "Study of femtosecond-laser- written waveguides in glasses," J. Opt. Soc. Am. B 19, pp.2496-2504, 2002
6. M. Will, S. Nolte, B. N. Chichkov, and A. Tunnermann, "Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses," Appl. Opt. 41, pp.4360-4364, 2002.
7. A. M. Strelsov, and N. F. Borrelli, "Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses," Opt. Lett. 26, pp.42-43, 2001.
8. K. Minoshima, A. M. Kowalevicz, I. Hartl, E. P. Ippen, and J. G. Fujimoto, "Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator," Opt. Lett. 26, pp.1516-1518, 2001.
9. D. Homoelle, S. Wielandy, A. L. Gaeta, N. F. Borrelli, and C.Smith, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett. 24, pp.1311-1313, 1999.
10. K. Sakuma, S. Ishikawa, T. Shikata, T. Fukuda, and H. Hosoya, "Ultra low-loss waveguide of 0.12dB/cm directly written in pure silica glass by femtosecond laser pulses," in Optical Fiber Communication Cofenrence, 2003 OSA Technical Digest Series (Optical Society of America, Atlanta, 2003), paper ThD2.
11. S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, "Femtosecond waveguide writing:a new avenue to three-dimensional integrated optics," Appl. Opt. A 77, pp.109-111, 2003.
12. E. Bricchi, J. D. Mills, P. G. Kazansky, B. G. Klappauf, and J. J. Baumberg, "Birefrigent Fresnel zone plate in silica fabricated by femtosecond laser maching," Opt. Lett. 27, pp.2200-2202, 2002.
13. K. Kawamura, M. Hirano, T. Kamiya, and H. Hosono, "Holographic writing of volume-type microgratings in silica glass by a single chirped laser pulse," Appl. Phys. Lett. 81, pp.1137-1139, 2002.
14. Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, "Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses," Electron. Lett. 36, pp.226-227, 2000.
15. C. Florea, and K. A. Winick, "Fabrication and characterization of photonic devices directly written in glass using femtosecond laser pulses," J. Lightwave Technol. 21, pp.246-253, 2003.
16. M. Kawata, K. Ohta, M. Obara, and H. Sekita, "Optical Waveguide Fabrication Inside Transparent Materials by Use of Plasma Channeling Induced by Tailored Femtosecond Laser," in Photon Processing in Microelectronics and Photonics II, A. Pique, K. Sugioka, P. R. Herman, J. Fieret, F. G. Bachmann, J. J. Dubowski, W. Hoving, K. Washio, D. B. Geohegan, F. Trager, K. Murakami, eds., Proc. SPIE 4977, pp.394-399, 2003.
17. Z. Wu, H. jiang, L. Luo, H. Guo, H. Yang, and Q. Gong, "Multplefoci and a long filament obserbed with focused femtosecond pulse propagation in fused silica," Opt. Lett. 27, pp.448-450, 2002.
18. Z. Wu, H. Jiang, H. Yang, and Q. Gong, "The refocusing behaviour of a focused femtoseocnd laser pulse in fused silica," J. Opt. A 5, pp.102-107, 2003.
19. L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, "Study of damage in fused silica induced by ultra-short IR laser pulses," Opt. Commun. 191, pp.333-339, 2001.
20. K. Yamada, W. Watanabe, T. Toma, and K. Itoh, "In situ observation of photoinduced refractive-index change in filaments formed in glasses by femtosecon laser pulses," Opt. Lett. 26, pp.19-21, 2001.
21. H. Misawa, H. B. Sun, S. Juodkazis, M. Watanabe, and S. Matsuo, "Microfabrication by femtosecond laser irradiation," in Laser Applications in Microelectronic and Optelectronic Manufacturing V, H. Helvajian, K. Sugioka, M. C. Gower, J. J. Dubowski, eds., Proc. SPIE 3933, pp.246-260, 2000.
22. S. H. Cho, H. Kumagai, and K. Midorikawa, "Fabrication of internal diffraction gratings in planar silica plates using low-density plasma formation induced by a femtosecond laser," Nucl. Instr. and Meth. B 197, pp.73-82, 2002.
23. D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, "Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials," Appl. Phys. Lett. 72, pp.1442-1444, 1998.
24. K. Ishikawa, H. Kumagai, and K. Midorikawa, "High-power regime of femtosecond-laser pulse propagation in silica: multiple-cone formation," Phys. Rev. E 66, 056608, 2002.
25. T. Tanaka, H.-B. Sun, and S. Kawata, "Rapid sub-diffraction-limit laser micro/nanoprocessing in a threshold material system," Appl. Phys. Lett. 80, pp.312-314, 2002.
26. M. Bass ed., Handbook of optics. McGraw-Hill, Inc. New-York, 1995.
27. E. N. Glenzer, and E. Mazur, "Ultrafast-laser driven microexprosions in transparent materials," Appl. Phys. Lett. 71, pp.882-884, 1997.
28. M. Watanabe, S. Juodkazis, H. -B. Sun, S. Matsuo, H. Misawa, M. Miwa, and R. Kaneko, "Transmission and photoluminescence images of three-dimansional memory in vitreous silica," Appl. Phys. Lett. 74, pp.3957-3959, 1999.
29. K. Winick, C. Florea, A. A. Said, T. Sosnowski, and B. Bado, "Fabrication of photonic devices in glass using femtosecond pulses," in OSA Annual Meeting, Long Beach, California, Oct. pp.14-18, 2001, paper ThAA1.
30. S. Nolte, M. Will, B. N. Chickhov, and A. Tuennermann, "Waveguides produced by ultrashort laser pulses inside glasses and crystals," in Proc. SPIE Photonics West, San Jose, CA, Jan. 2-25, 2002.
31. M. R. Junnarkar, "Short pulse propagation in tight focusing conditions," Opt. Comm. 195, pp.273-292, 2001.
32. M. Li, M. Ishizuka, X. Liu, Y. Sugimoto, N. Ikeda, and K. Asakawa, "Nanostructuring in submicron-level waveguides with femtosecond laser pulses" Opt. Comm. 212, pp.159-163, 2002.