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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 46, Issue 45-49, 2007, Pages

Etch stop process for fabrication of thin diaphragms in lithium niobate

(3) Randles, Andrew B a Esashi, Masayoshi a Tanaka, Shuji a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Bulk micromachining; Diaphragm; LiNbO3; Lithium niobate; Thermal inversion

Indexed keywords

ACIDS; ELECTROMAGNETIC WAVE PROPAGATION; FABRICATION; HYDROFLUORIC ACID; LITHIUM; NIOBIUM COMPOUNDS; SENSOR NETWORKS;

BULK CRYSTALS; BULK MICROMACHINING; ETCH RATES; ETCH STOPT; INVERSION LAYERS; LINBO3; LITHIUM NIOBATE; NOVEL PROCESSES; POLING DIRECTIONS; PROCESS USES; SENSOR APPLICATIONS; THERMAL INVERSION; THIN DIAPHRAGMS;

DIAPHRAGMS;

EID: 54249165516 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.L1099 Document Type: Article

Times cited : (5)

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