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Physica Status Solidi (A) Applications and Materials Science

Volumn 205, Issue 8, 2008, Pages 1943-1946

Growth and characterization of gallium oxide thin films by radiofrequency magnetron sputtering

(3) Marie, P a Portier, X a Cardin, J a

a UNIVERSITÉ DE CAEN (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TREATMENTS; FIGURE OF MERITS; GALLIUM OXIDES; GRAIN SIZES; NANOMETRES; OPTICAL AND ELECTRICAL CHARACTERIZATIONS; PHOTO-LUMINESCENCE; RADIOFREQUENCY MAGNETRON SPUTTERING; RANGING; SPUTTERING METHODS;

ANNEALING; CHARACTERIZATION; GALLIUM; MAGNETRONS; NEODYMIUM; OXIDE FILMS; RARE EARTH ELEMENTS; THICK FILMS; THIN FILMS;

MAGNETRON SPUTTERING;

EID: 54249136815 PISSN: 18626300 EISSN: 18626319 Source Type: Journal
DOI: 10.1002/pssa.200778856 Document Type: Conference Paper

Times cited : (54)

References (17)

1
- 21544454756
- M. Passlack, E. F. Schubert, W. S. Hobson, M. Hong, N. Moriya, S. N. G. Chu, K. Konstadinis, J. P. Mannaerts, M. L. Schnoes, and G. J. Zidzik, J. Appl. Phys. 77, 686 (1995).
- (1995) J. Appl. Phys , vol.77 , pp. 686
- Passlack, M.¹ Schubert, E.F.² Hobson, W.S.³ Hong, M.⁴ Moriya, N.⁵ Chu, S.N.G.⁶ Konstadinis, K.⁷ Mannaerts, J.P.⁸ Schnoes, M.L.⁹ Zidzik, G.J.¹⁰

2
- 17044403452
- T. Minami, Semicond. Sci. Technol. 20, 35 (2005).
- (2005) Semicond. Sci. Technol , vol.20 , pp. 35
- Minami, T.¹

3
- 0026171269
- M. Fleisher and H. Meixner, Sens. Actuators B 4, 437 (1991).
- (1991) Sens. Actuators B , vol.4 , pp. 437
- Fleisher, M.¹ Meixner, H.²

4
- 0001451866
- M. Passlack, N. E. J. Hunt, E. F. Schubert, G. J. Zidzik, M. Mong, J. P. Mannaerts, R. L. Opila, and R. J. Fischer, Appl. Phys. Lett. 64, 2715 (1994).
- (1994) Appl. Phys. Lett , vol.64 , pp. 2715
- Passlack, M.¹ Hunt, N.E.J.² Schubert, E.F.³ Zidzik, G.J.⁴ Mong, M.⁵ Mannaerts, J.P.⁶ Opila, R.L.⁷ Fischer, R.J.⁸

5
- 10444242593
- E. Fortunate, V. Assunçao, A. Gonçalves, A. Marques, H. Aguas, L. Pereira, I. Ferreira, P. Vilarinho, and R. Martins, Thin Solid Films 451, 443 (2004).
- (2004) Thin Solid Films , vol.451 , pp. 443
- Fortunate, E.¹ Assunçao, V.² Gonçalves, A.³ Marques, A.⁴ Aguas, H.⁵ Pereira, L.⁶ Ferreira, I.⁷ Vilarinho, P.⁸ Martins, R.⁹

6
- 0004121205
- CRC Press, Boca Raton, FL
- A. Shionoya and W. M. Yen, Phosphor Handbook (CRC Press, Boca Raton, FL, 1998).
- (1998) Phosphor Handbook
- Shionoya, A.¹ Yen, W.M.²

7
- 0033736889
- T. Miyata, T. Nakatani, and T. Minami, J. Lumin. 87-89, 1183 (2000).
- (2000) J. Lumin , vol.87-89 , pp. 1183
- Miyata, T.¹ Nakatani, T.² Minami, T.³

8
- 21544434997
- A. Callegari, P. D. Hoh, D. A. Duchanan, and D. Lacey, Appl. Phys. Lett. 54, 332 (1989).
- (1989) Appl. Phys. Lett , vol.54 , pp. 332
- Callegari, A.¹ Hoh, P.D.² Duchanan, D.A.³ Lacey, D.⁴

9
- 0037034961
- J. Hao and M. Cocivera, J. Phys. D, Appl. Phys. 35, 433 (2002).
- (2002) J. Phys. D, Appl. Phys , vol.35 , pp. 433
- Hao, J.¹ Cocivera, M.²

10
- 0001247504
- T. Minami, H. Yamada, Y. Kubota, T. Myata, and Y. Sakagami, Proc. of the Fourth International Display Workshop, 1997, p. 605.
- (1997) Proc. of the Fourth International Display Workshop , pp. 605
- Minami, T.¹ Yamada, H.² Kubota, Y.³ Myata, T.⁴ Sakagami, Y.⁵

11
- 0009260463
- A. R. Forouhi and I. Bloomer, Phys. Rev. B 34, 7018 (1989).
- (1989) Phys. Rev. B , vol.34 , pp. 7018
- Forouhi, A.R.¹ Bloomer, I.²

12
- 0000389489
- D. A. G. Bruggeman, Ann. Phys. 24, 636 (1935).
- (1935) Ann. Phys , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

13
- 54249086972
- S. Charvet, R. Madelon, F. Gourbilleau, and R. Rizk, J. Appl. Phys. 85, 257 (1999).
- (1999) J. Appl. Phys , vol.85 , pp. 257
- Charvet, S.¹ Madelon, R.² Gourbilleau, F.³ Rizk, R.⁴

14
- 23844483659
- H. Colder, R. Rizk, M. Morales, P. Marie, and J. Vicens, J. Appl. Phys. 98, 24313 (2005).
- (2005) J. Appl. Phys , vol.98 , pp. 24313
- Colder, H.¹ Rizk, R.² Morales, M.³ Marie, P.⁴ Vicens, J.⁵

15
- 54249106210
- L. Raneiro, A. Goncalves, A. Pimentel, I. Ferreira, S. Zhang, L. Pereira, H. Aguas, E. Fortunato, and R. Martins, Mater. Res. Soc. Symp. Proc. 862, A21.10.1 (2005).
- L. Raneiro, A. Goncalves, A. Pimentel, I. Ferreira, S. Zhang, L. Pereira, H. Aguas, E. Fortunato, and R. Martins, Mater. Res. Soc. Symp. Proc. 862, A21.10.1 (2005).

16
- 33747455324
- L. Raniero, I. Ferreira, A. Pimentel, A. Goncalves, P. Canhola, E. Fortunato, and R. Martins, Thin Solid Films 511, 295 (2005).
- (2005) Thin Solid Films , vol.511 , pp. 295
- Raniero, L.¹ Ferreira, I.² Pimentel, A.³ Goncalves, A.⁴ Canhola, P.⁵ Fortunato, E.⁶ Martins, R.⁷

17
- 27844491592
- T. Minami, Y. Mochizuki, and T. Miyata, Thin Solid Films 494, 33 (2006).
- (2006) Thin Solid Films , vol.494 , pp. 33
- Minami, T.¹ Mochizuki, Y.² Miyata, T.³

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