Combinatorial deposition of EL phosphor thin films by r.f. magnetron sputtering using a subdivided powder target

Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 33-37

  Minami, Tadatsugu ^a   Mochizuki, Yuu ^a   Miyata, Toshihiro ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Combinatorial deposition; Electroluminescence; Magnetron sputtering; Oxynitride; Phosphor; Thin film

Indexed keywords

ALUMINUM NITRIDE; COMPOSITION; ELECTRODEPOSITION; ELECTROLUMINESCENCE; GALLIUM NITRIDE; LIME; LUMINESCENT DEVICES; MAGNETRON SPUTTERING; OPTIMIZATION; PHOSPHORS; PHOTOLUMINESCENCE; SILICON NITRIDE; THIN FILM DEVICES; ZINC OXIDE;

COMBINATORIAL DEPOSITION; OXYNITRIDE; SUBSTRATE SURFACE;

THIN FILMS;

EID: 27844491592     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.168     Document Type: Conference Paper

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